Integrating a Semiconductor Heater Into Compact OEM Assemblies

https://mica-heater-journal.sagecurrent.com/posts/how-to-select-the-right-kapton-heater-size-and-wattage

In etch equipment, a semiconductor heater must deliver heat in a controlled way. It uses a resistive heating element integrated with an electrically insulating structure. One useful trait is repeatable heat delivery