Understanding Voltage, Resistance, and Power in a Wafer Heater Circuit
https://heater-engineering-hub.stonefielddigest.com/posts/how-temperature-sensors-work-with-a-silicone-heater
In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result